Enhanced Mechanical Properties and Thermal Stability of Al-based High Entropy Metal-Sublattice Nitride and Oxynitride Films
Hajas B.I.1,
Kretschmer A.1,
Kirnbauer A.1,
Schmid B.1,
Nemtou E.2,
Kolozsvári S.3,
Mayrhofer P.H.1
1TU WIEN, Austria
2Uppsala University, Sweden
3Plansee SE, Austria
Abstract
In the past two decades, the field of materials science has seen the rise of “high entropy alloys” (HEAs), comprising a solid solution of at least five primary elements in near-equimolar composition.
The nitrides studied include (Al,Cr,Ti,V,W)N, (Al,Cr,Mo,V,W)N, (Al,Hf,Ti,V,W)N, (Al,Cr,Hf,Ti,V)N, and (Al,Cr,Hf,V,Zr)N, building on Density Functional Theory calculations. These materials exhibited delayed formation of the detrimental wurtzite AlN phase during annealing. Additionally, their oxynitride and silicon-alloyed nitride counterparts showed exceptional performance for specific compositions.
The materials were prepared using reactive DC magnetron sputtering. Characterization techniques included X-ray diffraction, scanning electron microscopy and nanoindentation.
The primary investigation focused on how the mechanical properties of the coatings changed during vacuum annealing for up to 50 hours. Notably, none of the samples displayed wurtzite phase formation.
While the Si-alloyed variants were softer as-deposited, the oxynitrides demonstrated higher hardness both before and after annealing. For (Al,Cr,Ti,V,W)N both the oxynitride and the Si-alloyed nitride extended the lifetime at elevated temperatures
Cube-corner indentation indicated lower fracture toughness for the oxynitrides, whereas the silicon-alloyed variants exhibited values comparable to their Si-free counterparts.